Finger-inspired rigid-soft hybrid tactile sensor with superior sensitivity at high frequency

Jinhui Zhang, Haimin Yao, Jiaying Mo, Songyue Chen, Yu Xie, Shenglin Ma, Rui Chen, Tao Luo, Weisong Ling, Lifeng Qin (), Zuankai Wang () and Wei Zhou ()
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Jinhui Zhang: Xiamen University
Haimin Yao: The Hong Kong Polytechnic University, Hung Hom, Kowloon
Jiaying Mo: City University of Hong Kong
Songyue Chen: Xiamen University
Yu Xie: Xiamen University
Shenglin Ma: Xiamen University
Rui Chen: Xiamen University
Tao Luo: Xiamen University
Weisong Ling: Xiamen University
Lifeng Qin: Xiamen University
Zuankai Wang: City University of Hong Kong
Wei Zhou: Xiamen University

Nature Communications, 2022, vol. 13, issue 1, 1-9

Abstract: Abstract Among kinds of flexible tactile sensors, piezoelectric tactile sensor has the advantage of fast response for dynamic force detection. However, it suffers from low sensitivity at high-frequency dynamic stimuli. Here, inspired by finger structure—rigid skeleton embedded in muscle, we report a piezoelectric tactile sensor using a rigid-soft hybrid force-transmission-layer in combination with a soft bottom substrate, which not only greatly enhances the force transmission, but also triggers a significantly magnified effect in d31 working mode of the piezoelectric sensory layer, instead of conventional d33 mode. Experiments show that this sensor exhibits a super-high sensitivity of 346.5 pC N−1 (@ 30 Hz), wide bandwidth of 5–600 Hz and a linear force detection range of 0.009–4.3 N, which is ~17 times the theoretical sensitivity of d33 mode. Furthermore, the sensor is able to detect multiple force directions with high reliability, and shows great potential in robotic dynamic tactile sensing.

Date: 2022
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DOI: 10.1038/s41467-022-32827-7

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