High-speed, scanned laser structuring of multi-layered eco/bioresorbable materials for advanced electronic systems

Quansan Yang, Ziying Hu, Min-Ho Seo, Yameng Xu, Ying Yan, Yen-Hao Hsu, Jaime Berkovich, Kwonjae Lee, Tzu-Li Liu, Samantha McDonald, Haolin Nie, Hannah Oh, Mingzheng Wu, Jin-Tae Kim, Stephen A. Miller, Ying Jia, Serkan Butun, Wubin Bai, Hexia Guo, Junhwan Choi, Anthony Banks, Wilson Z. Ray, Yevgenia Kozorovitskiy, Matthew L. Becker, Mitchell A. Pet, Matthew R. MacEwan, Jan-Kai Chang, Heling Wang (), Yonggang Huang () and John A. Rogers ()
Additional contact information
Quansan Yang: Northwestern University
Ziying Hu: Northwestern University
Min-Ho Seo: Northwestern University
Yameng Xu: Washington University in St. Louis
Ying Yan: Washington University School of Medicine in St. Louis
Yen-Hao Hsu: Duke University
Jaime Berkovich: Northwestern University
Kwonjae Lee: Northwestern University
Tzu-Li Liu: Northwestern University
Samantha McDonald: Duke University
Haolin Nie: Northwestern University
Hannah Oh: Northwestern University
Mingzheng Wu: Northwestern University
Jin-Tae Kim: Northwestern University
Stephen A. Miller: Northwestern University
Ying Jia: Northwestern University
Serkan Butun: Northwestern University
Wubin Bai: Northwestern University
Hexia Guo: Northwestern University
Junhwan Choi: Northwestern University
Anthony Banks: Northwestern University
Wilson Z. Ray: Washington University School of Medicine in St. Louis
Yevgenia Kozorovitskiy: Northwestern University
Matthew L. Becker: Duke University
Mitchell A. Pet: Washington University School of Medicine in St. Louis
Matthew R. MacEwan: Washington University School of Medicine in St. Louis
Jan-Kai Chang: Northwestern University
Heling Wang: Northwestern University
Yonggang Huang: Northwestern University
John A. Rogers: Northwestern University

Nature Communications, 2022, vol. 13, issue 1, 1-19

Abstract: Abstract Physically transient forms of electronics enable unique classes of technologies, ranging from biomedical implants that disappear through processes of bioresorption after serving a clinical need to internet-of-things devices that harmlessly dissolve into the environment following a relevant period of use. Here, we develop a sustainable manufacturing pathway, based on ultrafast pulsed laser ablation, that can support high-volume, cost-effective manipulation of a diverse collection of organic and inorganic materials, each designed to degrade by hydrolysis or enzymatic activity, into patterned, multi-layered architectures with high resolution and accurate overlay registration. The technology can operate in patterning, thinning and/or cutting modes with (ultra)thin eco/bioresorbable materials of different types of semiconductors, dielectrics, and conductors on flexible substrates. Component-level demonstrations span passive and active devices, including diodes and field-effect transistors. Patterning these devices into interconnected layouts yields functional systems, as illustrated in examples that range from wireless implants as monitors of neural and cardiac activity, to thermal probes of microvascular flow, and multi-electrode arrays for biopotential sensing. These advances create important processing options for eco/bioresorbable materials and associated electronic systems, with immediate applicability across nearly all types of bioelectronic studies.

Date: 2022
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DOI: 10.1038/s41467-022-34173-0

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