Carbon nanotube-based flexible high-speed circuits with sub-nanosecond stage delays

Guanhua Long, Wanlin Jin, Fan Xia, Yuru Wang, Tianshun Bai, Xingxing Chen, Xuelei Liang, Lian-Mao Peng () and Youfan Hu ()
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Guanhua Long: Peking University
Wanlin Jin: Peking University
Fan Xia: Peking University
Yuru Wang: Peking University
Tianshun Bai: Peking University
Xingxing Chen: Peking University
Xuelei Liang: Peking University
Lian-Mao Peng: Peking University
Youfan Hu: Peking University

Nature Communications, 2022, vol. 13, issue 1, 1-8

Abstract: Abstract High-speed flexible circuits are required in flexible systems to realize real-time information analysis or to construct wireless communication modules for emerging applications. Here, we present scaled carbon nanotube-based thin film transistors (CNT-TFTs) with channel lengths down to 450 nm on 2-μm-thick parylene substrates, achieving state-of-the-art performances of high on-state current (187.6 μA μm−1) and large transconductance (123.3 μS μm−1). Scaling behavior analyses reveal that the enhanced performance introduced by scaling is attributed to channel resistance reduction while the contact resistance (180 ± 50 kΩ per tube) remains unchanged, which is comparable to that achieved in devices on rigid substrates, indicating great potential in ultimate scaled flexible CNT-TFTs with high performance comparable to their counterparts on rigid substrates where contact resistance dominates the performance. Five-stage flexible ring oscillators are built to benchmark the speed of scaled devices, demonstrating a 281 ps stage delay at a low supply voltage of 2.6 V.

Date: 2022
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DOI: 10.1038/s41467-022-34621-x

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