General low-temperature growth of two-dimensional nanosheets from layered and nonlayered materials

Biao Qin, Muhammad Zeeshan Saeed, Qiuqiu Li, Manli Zhu, Ya Feng, Ziqi Zhou, Jingzhi Fang, Mongur Hossain, Zucheng Zhang, Yucheng Zhou, Ying Huangfu, Rong Song, Jingmei Tang, Bailing Li, Jialing Liu, Di Wang, Kun He, Hongmei Zhang, Ruixia Wu, Bei Zhao, Jia Li, Lei Liao, Zhongming Wei, Bo Li (), Xiangfeng Duan and Xidong Duan ()
Additional contact information
Biao Qin: College of Semiconductors (College of Integrated Circuits), School of Physics and Electronics, Hunan University
Muhammad Zeeshan Saeed: College of Chemistry and Chemical Engineering, Hunan University
Qiuqiu Li: College of Chemistry and Chemical Engineering, Hunan University
Manli Zhu: College of Semiconductors (College of Integrated Circuits), School of Physics and Electronics, Hunan University
Ya Feng: College of Semiconductors (College of Integrated Circuits), School of Physics and Electronics, Hunan University
Ziqi Zhou: Institute of Semiconductors, Chinese Academy of Sciences
Jingzhi Fang: Institute of Semiconductors, Chinese Academy of Sciences
Mongur Hossain: College of Chemistry and Chemical Engineering, Hunan University
Zucheng Zhang: College of Chemistry and Chemical Engineering, Hunan University
Yucheng Zhou: College of Chemistry and Chemical Engineering, Hunan University
Ying Huangfu: College of Chemistry and Chemical Engineering, Hunan University
Rong Song: College of Chemistry and Chemical Engineering, Hunan University
Jingmei Tang: College of Chemistry and Chemical Engineering, Hunan University
Bailing Li: College of Chemistry and Chemical Engineering, Hunan University
Jialing Liu: College of Chemistry and Chemical Engineering, Hunan University
Di Wang: College of Chemistry and Chemical Engineering, Hunan University
Kun He: College of Semiconductors (College of Integrated Circuits), School of Physics and Electronics, Hunan University
Hongmei Zhang: College of Chemistry and Chemical Engineering, Hunan University
Ruixia Wu: College of Chemistry and Chemical Engineering, Hunan University
Bei Zhao: College of Chemistry and Chemical Engineering, Hunan University
Jia Li: College of Chemistry and Chemical Engineering, Hunan University
Lei Liao: College of Semiconductors (College of Integrated Circuits), School of Physics and Electronics, Hunan University
Zhongming Wei: Institute of Semiconductors, Chinese Academy of Sciences
Bo Li: College of Semiconductors (College of Integrated Circuits), School of Physics and Electronics, Hunan University
Xiangfeng Duan: University of California
Xidong Duan: College of Chemistry and Chemical Engineering, Hunan University

Nature Communications, 2023, vol. 14, issue 1, 1-12

Abstract: Abstract Most of the current methods for the synthesis of two-dimensional materials (2DMs) require temperatures not compatible with traditional back-end-of-line (BEOL) processes in semiconductor industry (450 °C). Here, we report a general BiOCl-assisted chemical vapor deposition (CVD) approach for the low-temperature synthesis of 27 ultrathin 2DMs. In particular, by mixing BiOCl with selected metal powders to produce volatile intermediates, we show that ultrathin 2DMs can be produced at 280–500 °C, which are ~200–300 °C lower than the temperatures required for salt-assisted CVD processes. In-depth characterizations and theoretical calculations reveal the low-temperature processes promoting 2D growth and the oxygen-inhibited synthetic mechanism ensuring the formation of ultrathin nonlayered 2DMs. We demonstrate that the resulting 2DMs exhibit electrical, magnetic and optoelectronic properties comparable to those of 2DMs grown at much higher temperatures. The general low-temperature preparation of ultrathin 2DMs defines a rich material platform for exploring exotic physics and facile BEOL integration in semiconductor industry.

Date: 2023
References: View references in EconPapers View complete reference list from CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
https://www.nature.com/articles/s41467-023-35983-6 Abstract (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-35983-6

Ordering information: This journal article can be ordered from
https://www.nature.com/ncomms/

DOI: 10.1038/s41467-023-35983-6

Access Statistics for this article

Nature Communications is currently edited by Nathalie Le Bot, Enda Bergin and Fiona Gillespie

More articles in Nature Communications from Nature
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().