Nanoscale three-dimensional fabrication based on mechanically guided assembly

Junseong Ahn, Ji-Hwan Ha, Yongrok Jeong, Young Jung, Jungrak Choi, Jimin Gu, Soon Hyoung Hwang, Mingu Kang, Jiwoo Ko, Seokjoo Cho, Hyeonseok Han, Kyungnam Kang, Jaeho Park, Sohee Jeon, Jun-Ho Jeong () and Inkyu Park ()
Additional contact information
Junseong Ahn: Korea Advanced Institute of Science and Technology (KAIST)
Ji-Hwan Ha: Korea Advanced Institute of Science and Technology (KAIST)
Yongrok Jeong: Korea Advanced Institute of Science and Technology (KAIST)
Young Jung: Korea Advanced Institute of Science and Technology (KAIST)
Jungrak Choi: Korea Advanced Institute of Science and Technology (KAIST)
Jimin Gu: Korea Advanced Institute of Science and Technology (KAIST)
Soon Hyoung Hwang: Korea Institute of Machinery and Materials (KIMM)
Mingu Kang: Korea Advanced Institute of Science and Technology (KAIST)
Jiwoo Ko: Korea Advanced Institute of Science and Technology (KAIST)
Seokjoo Cho: Korea Advanced Institute of Science and Technology (KAIST)
Hyeonseok Han: Korea Advanced Institute of Science and Technology (KAIST)
Kyungnam Kang: Korea Advanced Institute of Science and Technology (KAIST)
Jaeho Park: Korea Advanced Institute of Science and Technology (KAIST)
Sohee Jeon: Korea Institute of Machinery and Materials (KIMM)
Jun-Ho Jeong: Korea Institute of Machinery and Materials (KIMM)
Inkyu Park: Korea Advanced Institute of Science and Technology (KAIST)

Nature Communications, 2023, vol. 14, issue 1, 1-10

Abstract: Abstract The growing demand for complex three-dimensional (3D) micro-/nanostructures has inspired the development of the corresponding manufacturing techniques. Among these techniques, 3D fabrication based on mechanically guided assembly offers the advantages of broad material compatibility, high designability, and structural reversibility under strain but is not applicable for nanoscale device printing because of the bottleneck at nanofabrication and design technique. Herein, a configuration-designable nanoscale 3D fabrication is suggested through a robust nanotransfer methodology and design of substrate’s mechanical characteristics. Covalent bonding–based two-dimensional nanotransfer allowing for nanostructure printing on elastomer substrates is used to address fabrication problems, while the feasibility of configuration design through the modulation of substrate’s mechanical characteristics is examined using analytical calculations and numerical simulations, allowing printing of various 3D nanostructures. The printed nanostructures exhibit strain-independent electrical properties and are therefore used to fabricate stretchable H2 and NO2 sensors with high performances stable under external strains of 30%.

Date: 2023
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DOI: 10.1038/s41467-023-36302-9

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