A sub-wavelength Si LED integrated in a CMOS platform

Zheng Li (), Jin Xue, Marc Cea, Jaehwan Kim, Hao Nong, Daniel Chong, Khee Yong Lim, Elgin Quek and Rajeev J. Ram ()
Additional contact information
Zheng Li: Massachusetts Institute of Technology
Jin Xue: Massachusetts Institute of Technology
Marc Cea: Massachusetts Institute of Technology
Jaehwan Kim: Massachusetts Institute of Technology
Hao Nong: GlobalFoundries Singapore Pte. Ltd.
Daniel Chong: GlobalFoundries Singapore Pte. Ltd.
Khee Yong Lim: GlobalFoundries Singapore Pte. Ltd.
Elgin Quek: GlobalFoundries Singapore Pte. Ltd.
Rajeev J. Ram: Massachusetts Institute of Technology

Nature Communications, 2023, vol. 14, issue 1, 1-9

Abstract: Abstract A nanoscale on-chip light source with high intensity is desired for various applications in integrated photonics systems. However, it is challenging to realize such an emitter using materials and fabrication processes compatible with the standard integrated circuit technology. In this letter, we report an electrically driven Si light-emitting diode with sub-wavelength emission area fabricated in an open-foundry microelectronics complementary metal-oxide-semiconductor platform. The light-emitting diode emission spectrum is centered around 1100 nm and the emission area is smaller than 0.14 μm2 (~ $$\varnothing 400$$ ∅ 400 nm). This light-emitting diode has high spatial intensity of >50 mW/cm2 which is comparable with state-of-the-art Si-based emitters with much larger emission areas. Due to sub-wavelength confinement, the emission exhibits a high degree of spatial coherence, which is demonstrated by incorporating the light-emitting diode into a compact lensless in-line holographic microscope. This centimeter-scale, all-silicon microscope utilizes a single emitter to simultaneously illuminate ~9.5 million pixels of a complementary metal-oxide-semiconductor imager.

Date: 2023
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DOI: 10.1038/s41467-023-36639-1

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