Ultrafast 3D nanofabrication via digital holography

Wenqi Ouyang, Xiayi Xu, Wanping Lu, Ni Zhao, Fei Han () and Shih-Chi Chen ()
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Wenqi Ouyang: The Chinese University of Hong Kong
Xiayi Xu: The Chinese University of Hong Kong
Wanping Lu: The Chinese University of Hong Kong
Ni Zhao: The Chinese University of Hong Kong
Fei Han: The Chinese University of Hong Kong
Shih-Chi Chen: The Chinese University of Hong Kong

Nature Communications, 2023, vol. 14, issue 1, 1-9

Abstract: Abstract There has been a compelling demand of fabricating high-resolution complex three-dimensional (3D) structures in nanotechnology. While two-photon lithography (TPL) largely satisfies the need since its introduction, its low writing speed and high cost make it impractical for many large-scale applications. We report a digital holography-based TPL platform that realizes parallel printing with up to 2000 individually programmable laser foci to fabricate complex 3D structures with 90 nm resolution. This effectively improves the fabrication rate to 2,000,000 voxels/sec. The promising result is enabled by the polymerization kinetics under a low-repetition-rate regenerative laser amplifier, where the smallest features are defined via a single laser pulse at 1 kHz. We have fabricated large-scale metastructures and optical devices of up to centimeter-scale to validate the predicted writing speed, resolution, and cost. The results confirm our method provides an effective solution for scaling up TPL for applications beyond laboratory prototyping.

Date: 2023
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DOI: 10.1038/s41467-023-37163-y

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