3D Printing and processing of miniaturized transducers with near-pristine piezoelectric ceramics for localized cavitation

Haotian Lu, Huachen Cui, Gengxi Lu, Laiming Jiang, Ryan Hensleigh, Yushun Zeng, Adnan Rayes, Mohanchandra K. Panduranga, Megha Acharya, Zhen Wang, Andrei Irimia, Felix Wu, Gregory P. Carman, José M. Morales, Seth Putterman, Lane W. Martin, Qifa Zhou and Xiaoyu (Rayne) Zheng ()
Additional contact information
Haotian Lu: University of California, Berkeley
Huachen Cui: University of California
Gengxi Lu: University of Southern California
Laiming Jiang: University of Southern California
Ryan Hensleigh: University of California
Yushun Zeng: University of Southern California
Adnan Rayes: University of Southern California
Mohanchandra K. Panduranga: University of California
Megha Acharya: University of California, Berkeley
Zhen Wang: University of California, Berkeley
Andrei Irimia: University of Southern California
Felix Wu: Energy Efficiency and Renewable Energy, U.S. Department of Energy
Gregory P. Carman: University of California
José M. Morales: University of California
Seth Putterman: University of California
Lane W. Martin: University of California, Berkeley
Qifa Zhou: University of Southern California
Xiaoyu (Rayne) Zheng: University of California, Berkeley

Nature Communications, 2023, vol. 14, issue 1, 1-11

Abstract: Abstract The performance of ultrasonic transducers is largely determined by the piezoelectric properties and geometries of their active elements. Due to the brittle nature of piezoceramics, existing processing tools for piezoelectric elements only achieve simple geometries, including flat disks, cylinders, cubes and rings. While advances in additive manufacturing give rise to free-form fabrication of piezoceramics, the resultant transducers suffer from high porosity, weak piezoelectric responses, and limited geometrical flexibility. We introduce optimized piezoceramic printing and processing strategies to produce highly responsive piezoelectric microtransducers that operate at ultrasonic frequencies. The 3D printed dense piezoelectric elements achieve high piezoelectric coefficients and complex architectures. The resulting piezoelectric charge constant, d33, and coupling factor, kt, of the 3D printed piezoceramic reach 583 pC/N and 0.57, approaching the properties of pristine ceramics. The integrated printing of transducer packaging materials and 3D printed piezoceramics with microarchitectures create opportunities for miniaturized piezoelectric ultrasound transducers capable of acoustic focusing and localized cavitation within millimeter-sized channels, leading to miniaturized ultrasonic devices that enable a wide range of biomedical applications.

Date: 2023
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Citations: View citations in EconPapers (3)

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DOI: 10.1038/s41467-023-37335-w

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