Microcantilever-integrated photonic circuits for broadband laser beam scanning

Saeed Sharif Azadeh (), Jason C. C. Mak, Hong Chen, Xianshu Luo, Fu- Der Chen, Hongyao Chua, Frank Weiss, Christopher Alexiev, Andrei Stalmashonak, Youngho Jung, John N. Straguzzi, Guo-Qiang Lo, Wesley D. Sacher and Joyce K. S. Poon ()
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Saeed Sharif Azadeh: Max Planck Institute of Microstructure Physics
Jason C. C. Mak: University of Toronto, Department of Electrical and Computer Engineering
Hong Chen: Max Planck Institute of Microstructure Physics
Xianshu Luo: Advanced Micro Foundry Pte. Ltd.
Fu- Der Chen: Max Planck Institute of Microstructure Physics
Hongyao Chua: Advanced Micro Foundry Pte. Ltd.
Frank Weiss: Max Planck Institute of Microstructure Physics
Christopher Alexiev: University of Toronto, Department of Electrical and Computer Engineering
Andrei Stalmashonak: Max Planck Institute of Microstructure Physics
Youngho Jung: Max Planck Institute of Microstructure Physics
John N. Straguzzi: Max Planck Institute of Microstructure Physics
Guo-Qiang Lo: Advanced Micro Foundry Pte. Ltd.
Wesley D. Sacher: Max Planck Institute of Microstructure Physics
Joyce K. S. Poon: Max Planck Institute of Microstructure Physics

Nature Communications, 2023, vol. 14, issue 1, 1-8

Abstract: Abstract Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm2 areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.

Date: 2023
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DOI: 10.1038/s41467-023-38260-8

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