Iontronic pressure sensor with high sensitivity over ultra-broad linear range enabled by laser-induced gradient micro-pyramids

Ruoxi Yang, Ankan Dutta, Bowen Li, Naveen Tiwari, Wanqing Zhang, Zhenyuan Niu, Yuyan Gao, Daniel Erdely, Xin Xin, Tiejun Li () and Huanyu Cheng ()
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Ruoxi Yang: Hebei University of Technology
Ankan Dutta: The Pennsylvania State University
Bowen Li: The Pennsylvania State University
Naveen Tiwari: The Pennsylvania State University
Wanqing Zhang: The Pennsylvania State University
Zhenyuan Niu: The Pennsylvania State University
Yuyan Gao: The Pennsylvania State University
Daniel Erdely: The Pennsylvania State University
Xin Xin: The Pennsylvania State University
Tiejun Li: Hebei University of Technology
Huanyu Cheng: The Pennsylvania State University

Nature Communications, 2023, vol. 14, issue 1, 1-12

Abstract: Abstract Despite the extensive developments of flexible capacitive pressure sensors, it is still elusive to simultaneously achieve excellent linearity over a broad pressure range, high sensitivity, and ultrahigh pressure resolution under large pressure preloads. Here, we present a programmable fabrication method for microstructures to integrate an ultrathin ionic layer. The resulting optimized sensor exhibits a sensitivity of 33.7 kPa−1 over a linear range of 1700 kPa, a detection limit of 0.36 Pa, and a pressure resolution of 0.00725% under the pressure of 2000 kPa. Taken together with rapid response/recovery and excellent repeatability, the sensor is applied to subtle pulse detection, interactive robotic hand, and ultrahigh-resolution smart weight scale/chair. The proposed fabrication approaches and design toolkit from this work can also be leveraged to easily tune the pressure sensor performance for varying target applications and open up opportunities to create other iontronic sensors.

Date: 2023
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DOI: 10.1038/s41467-023-38274-2

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