Direct laser writing of 3D electrodes on flexible substrates

Morgan A. Brown, Kara M. Zappitelli, Loveprit Singh, Rachel C. Yuan, Melissa Bemrose, Valerie Brogden, David J. Miller, Matthew C. Smear, Stuart F. Cogan and Timothy J. Gardner ()
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Morgan A. Brown: University of Oregon
Kara M. Zappitelli: University of Oregon
Loveprit Singh: University of Oregon
Rachel C. Yuan: University of Oregon
Melissa Bemrose: University of Oregon
Valerie Brogden: University of Oregon
David J. Miller: University of Oregon
Matthew C. Smear: University of Oregon
Stuart F. Cogan: The University of Texas at Dallas
Timothy J. Gardner: University of Oregon

Nature Communications, 2023, vol. 14, issue 1, 1-11

Abstract: Abstract This report describes a 3D microelectrode array integrated on a thin-film flexible cable for neural recording in small animals. The fabrication process combines traditional silicon thin-film processing techniques and direct laser writing of 3D structures at micron resolution via two-photon lithography. Direct laser-writing of 3D-printed electrodes has been described before, but this report is the first to provide a method for producing high-aspect-ratio structures. One prototype, a 16-channel array with 300 µm pitch, demonstrates successful electrophysiological signal capture from bird and mouse brains. Additional devices include 90 µm pitch arrays, biomimetic mosquito needles that penetrate through the dura of birds, and porous electrodes with enhanced surface area. The rapid 3D printing and wafer-scale methods described here will enable efficient device fabrication and new studies examining the relationship between electrode geometry and electrode performance. Applications include small animal models, nerve interfaces, retinal implants, and other devices requiring compact, high-density 3D electrodes.

Date: 2023
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DOI: 10.1038/s41467-023-39152-7

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