Laser maskless fast patterning for multitype microsupercapacitors

Yongjiu Yuan, Xin Li (), Lan Jiang (), Misheng Liang, Xueqiang Zhang, Shouyu Wu, Junrui Wu, Mengyao Tian, Yang Zhao and Liangti Qu
Additional contact information
Yongjiu Yuan: Beijing Institute of Technology
Xin Li: Beijing Institute of Technology
Lan Jiang: Beijing Institute of Technology
Misheng Liang: Beijing Information Science and Technology University
Xueqiang Zhang: Beijing Institute of Technology
Shouyu Wu: Beijing Institute of Technology
Junrui Wu: Beijing Institute of Technology
Mengyao Tian: Beijing Institute of Technology
Yang Zhao: School of Chemistry and Chemical Engineering, Beijing Institute of Technology
Liangti Qu: Tsinghua University

Nature Communications, 2023, vol. 14, issue 1, 1-12

Abstract: Abstract Downsizing electrode architectures have significant potential for microscale energy storage devices. Asymmetric micro-supercapacitors play an essential role in various applications due to their high voltage window and energy density. However, efficient production and sophisticated miniaturization of asymmetric micro-supercapacitors remains challenging. Here, we develop a maskless ultrafast fabrication of multitype micron-sized (10 × 10 μm2) micro-supercapacitors via temporally and spatially shaped femtosecond laser. MXene/1T-MoS2 can be integrated with laser-induced MXene-derived TiO2 and 1T-MoS2-derived MoO3 to generate over 6,000 symmetric micro-supercapacitors or 3,000 asymmetric micro-supercapacitors with high-resolution (200 nm) per minute. The asymmetric micro-supercapacitors can be integrated with other micro devices, thanks to the ultrahigh specific capacitance (220 mF cm−2 and 1101 F cm−3), voltage windows in series (52 V), energy density (0.495 Wh cm−3) and power density (28 kW cm−3). Our approach enables the industrial manufacturing of multitype micro-supercapacitors and improves the feasibility and flexibility of micro-supercapacitors in practical applications.

Date: 2023
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DOI: 10.1038/s41467-023-39760-3

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