Probing three-dimensional mesoscopic interfacial structures in a single view using multibeam X-ray coherent surface scattering and holography imaging

Miaoqi Chu (), Zhang Jiang, Michael Wojcik, Tao Sun, Michael Sprung and Jin Wang ()
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Miaoqi Chu: X-ray Science Division, Argonne National Laboratory
Zhang Jiang: X-ray Science Division, Argonne National Laboratory
Michael Wojcik: X-ray Science Division, Argonne National Laboratory
Tao Sun: X-ray Science Division, Argonne National Laboratory
Michael Sprung: Deutsches Elektronen-Synchrotron (DESY)
Jin Wang: X-ray Science Division, Argonne National Laboratory

Nature Communications, 2023, vol. 14, issue 1, 1-13

Abstract: Abstract Visualizing surface-supported and buried planar mesoscale structures, such as nanoelectronics, ultrathin-film quantum dots, photovoltaics, and heterogeneous catalysts, often requires high-resolution X-ray imaging and scattering. Here, we discovered that multibeam scattering in grazing-incident reflection geometry is sensitive to three-dimensional (3D) structures in a single view, which is difficult in conventional scattering or imaging approaches. We developed a 3D finite-element-based multibeam-scattering analysis to decode the heterogeneous electric-field distribution and to faithfully reproduce the complex scattering and surface features. This approach further leads to the demonstration of hard-X-ray Lloyd’s mirror interference of scattering waves, resembling dark-field, high-contrast surface holography under the grazing-angle scattering conditions. A first-principles calculation of the single-view holographic images resolves the surface patterns’ 3D morphology with nanometer resolutions, which is critical for ultrafine nanocircuit metrology. The holographic method and simulations pave the way for single-shot structural characterization for visualizing irreversible and morphology-transforming physical and chemical processes in situ or operando.

Date: 2023
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DOI: 10.1038/s41467-023-39984-3

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