Topotactic fabrication of transition metal dichalcogenide superconducting nanocircuits

Xiaohan Wang, Hao Wang (), Liang Ma, Labao Zhang (), Zhuolin Yang, Daxing Dong, Xi Chen, Haochen Li, Yanqiu Guan, Biao Zhang, Qi Chen, Lili Shi, Hui Li, Zhi Qin, Xuecou Tu, Lijian Zhang, Xiaoqing Jia, Jian Chen, Lin Kang and Peiheng Wu ()
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Xiaohan Wang: Nanjing University
Hao Wang: Nanjing University
Liang Ma: Nanjing University
Labao Zhang: Nanjing University
Zhuolin Yang: Nanjing University
Daxing Dong: Nanjing University of Aeronautics and Astronautics
Xi Chen: Tsinghua University
Haochen Li: Nanjing University
Yanqiu Guan: Nanjing University
Biao Zhang: Nanjing University
Qi Chen: Nanjing University
Lili Shi: Nanjing University
Hui Li: Nanjing University
Zhi Qin: Nanjing University
Xuecou Tu: Nanjing University
Lijian Zhang: Nanjing University
Xiaoqing Jia: Nanjing University
Jian Chen: Nanjing University
Lin Kang: Nanjing University
Peiheng Wu: Nanjing University

Nature Communications, 2023, vol. 14, issue 1, 1-8

Abstract: Abstract Superconducting nanocircuits, which are usually fabricated from superconductor films, are the core of superconducting electronic devices. While emerging transition-metal dichalcogenide superconductors (TMDSCs) with exotic properties show promise for exploiting new superconducting mechanisms and applications, their environmental instability leads to a substantial challenge for the nondestructive preparation of TMDSC nanocircuits. Here, we report a universal strategy to fabricate TMDSC nanopatterns via a topotactic conversion method using prepatterned metals as precursors. Typically, robust NbSe2 meandering nanowires can be controllably manufactured on a wafer scale, by which a superconducting nanowire circuit is principally demonstrated toward potential single photon detection. Moreover, versatile superconducting nanocircuits, e.g., periodical circle/triangle hole arrays and spiral nanowires, can be prepared with selected TMD materials (NbS2, TiSe2, or MoTe2). This work provides a generic approach for fabricating nondestructive TMDSC nanocircuits with precise control, which paves the way for the application of TMDSCs in future electronics.

Date: 2023
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DOI: 10.1038/s41467-023-39997-y

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