Metal 3D nanoprinting with coupled fields

Bingyan Liu, Shirong Liu, Vasanthan Devaraj, Yuxiang Yin, Yueqi Zhang, Jingui Ai, Yaochen Han and Jicheng Feng ()
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Bingyan Liu: ShanghaiTech University
Shirong Liu: ShanghaiTech University
Vasanthan Devaraj: Pusan National University
Yuxiang Yin: ShanghaiTech University
Yueqi Zhang: ShanghaiTech University
Jingui Ai: ShanghaiTech University
Yaochen Han: ShanghaiTech University
Jicheng Feng: ShanghaiTech University

Nature Communications, 2023, vol. 14, issue 1, 1-11

Abstract: Abstract Metallized arrays of three-dimensional (3D) nanoarchitectures offer new and exciting prospects in nanophotonics and nanoelectronics. Engineering these repeating nanoarchitectures, which have dimensions smaller than the wavelength of the light source, enables in-depth investigation of unprecedented light–matter interactions. Conventional metal nanomanufacturing relies largely on lithographic methods that are limited regarding the choice of materials and machine write time and are restricted to flat patterns and rigid structures. Herein, we present a 3D nanoprinter devised to fabricate flexible arrays of 3D metallic nanoarchitectures over areas up to 4 × 4 mm2 within 20 min. By suitably adjusting the electric and flow fields, metal lines as narrow as 14 nm were printed. We also demonstrate the key ability to print a wide variety of materials ranging from single metals, alloys to multimaterials. In addition, the optical properties of the as-printed 3D nanoarchitectures can be tailored by varying the material, geometry, feature size, and periodic arrangement. The custom-designed and custom-built 3D nanoprinter not only combines metal 3D printing with nanoscale precision but also decouples the materials from the printing process, thereby yielding opportunities to advance future nanophotonics and semiconductor devices.

Date: 2023
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DOI: 10.1038/s41467-023-40577-3

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