Stacking transfer of wafer-scale graphene-based van der Waals superlattices

Guowen Yuan, Weilin Liu, Xianlei Huang, Zihao Wan, Chao Wang, Bing Yao, Wenjie Sun, Hang Zheng, Kehan Yang, Zhenjia Zhou, Yuefeng Nie, Jie Xu and Libo Gao ()
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Guowen Yuan: Nanjing University
Weilin Liu: Nanjing University
Xianlei Huang: Nanjing University
Zihao Wan: Nanjing University
Chao Wang: Nanjing University
Bing Yao: Nanjing University
Wenjie Sun: Nanjing University
Hang Zheng: Nanjing University
Kehan Yang: Nanjing University
Zhenjia Zhou: Nanjing University
Yuefeng Nie: Nanjing University
Jie Xu: Nanjing University
Libo Gao: Nanjing University

Nature Communications, 2023, vol. 14, issue 1, 1-10

Abstract: Abstract High-quality graphene-based van der Waals superlattices are crucial for investigating physical properties and developing functional devices. However, achieving homogeneous wafer-scale graphene-based superlattices with controlled twist angles is challenging. Here, we present a flat-to-flat transfer method for fabricating wafer-scale graphene and graphene-based superlattices. The aqueous solution between graphene and substrate is removed by a two-step spinning-assisted dehydration procedure with the optimal wetting angle. Proton-assisted treatment is further used to clean graphene surfaces and interfaces, which also decouples graphene and neutralizes the doping levels. Twist angles between different layers are accurately controlled by adjusting the macroscopic stacking angle through their wafer flats. Transferred films exhibit minimal defects, homogeneous morphology, and uniform electrical properties over wafer scale. Even at room temperature, robust quantum Hall effects are observed in graphene films with centimetre-scale linewidth. Our stacking transfer method can facilitate the fabrication of graphene-based van der Waals superlattices and accelerate functional device applications.

Date: 2023
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DOI: 10.1038/s41467-023-41296-5

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