Reconfiguring nucleation for CVD growth of twisted bilayer MoS2 with a wide range of twist angles

Manzhang Xu, Hongjia Ji, Lu Zheng, Weiwei Li, Jing Wang, Hanxin Wang, Lei Luo, Qianbo Lu, Xuetao Gan, Zheng Liu, Xuewen Wang () and Wei Huang ()
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Manzhang Xu: Northwestern Polytechnical University
Hongjia Ji: Northwestern Polytechnical University
Lu Zheng: Northwestern Polytechnical University
Weiwei Li: Northwestern Polytechnical University
Jing Wang: Northwestern Polytechnical University
Hanxin Wang: Northwestern Polytechnical University
Lei Luo: Northwestern Polytechnical University
Qianbo Lu: Northwestern Polytechnical University
Xuetao Gan: Northwestern Polytechnical University
Zheng Liu: Nanyang Technological University
Xuewen Wang: Northwestern Polytechnical University
Wei Huang: Northwestern Polytechnical University

Nature Communications, 2024, vol. 15, issue 1, 1-12

Abstract: Abstract Twisted bilayer (TB) transition metal dichalcogenides (TMDCs) beyond TB-graphene are considered an ideal platform for investigating condensed matter physics, due to the moiré superlattices-related peculiar band structures and distinct electronic properties. The growth of large-area and high-quality TB-TMDCs with wide twist angles would be significant for exploring twist angle-dependent physics and applications, but remains challenging to implement. Here, we propose a reconfiguring nucleation chemical vapor deposition (CVD) strategy for directly synthesizing TB-MoS2 with twist angles from 0° to 120°. The twist angles-dependent Moiré periodicity can be clearly observed, and the interlayer coupling shows a strong relationship to the twist angles. Moreover, the yield of TB-MoS2 in bilayer MoS2 and density of TB-MoS2 are significantly improved to 17.2% and 28.9 pieces/mm2 by tailoring gas flow rate and molar ratio of NaCl to MoO3. The proposed reconfiguring nucleation approach opens an avenue for the precise growth of TB-TMDCs for both fundamental research and practical applications.

Date: 2024
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DOI: 10.1038/s41467-023-44598-w

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