Centimeter-scale nanomechanical resonators with low dissipation

Andrea Cupertino, Dongil Shin, Leo Guo, Peter G. Steeneken, Miguel A. Bessa () and Richard A. Norte ()
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Andrea Cupertino: Delft University of Technology
Dongil Shin: Delft University of Technology
Leo Guo: Delft University of Technology
Peter G. Steeneken: Delft University of Technology
Miguel A. Bessa: Brown University
Richard A. Norte: Delft University of Technology

Nature Communications, 2024, vol. 15, issue 1, 1-10

Abstract: Abstract High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies – comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions.

Date: 2024
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DOI: 10.1038/s41467-024-48183-7

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