A zinc oxide resonant nano-accelerometer with ultra-high sensitivity

Pengfei Xu, Dazhi Wang (), Jianqiao He, Yichang Cui, Liangkun Lu, Yikang Li, Xiangji Chen, Chang Liu, Liujia Suo, Tongqun Ren, Tiesheng Wang and Yan Cui
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Pengfei Xu: Dalian University of Technology
Dazhi Wang: Dalian University of Technology
Jianqiao He: Dalian University of Technology
Yichang Cui: Dalian University of Technology
Liangkun Lu: Dalian University of Technology
Yikang Li: Dalian University of Technology
Xiangji Chen: Dalian University of Technology
Chang Liu: Dalian University of Technology
Liujia Suo: Dalian University of Technology
Tongqun Ren: Dalian University of Technology
Tiesheng Wang: Dalian University of Technology
Yan Cui: Dalian University of Technology

Nature Communications, 2024, vol. 15, issue 1, 1-8

Abstract: Abstract Nanoelectromechanical system accelerometers have the potential to be utilized in next-generation consumer electronics, inertial navigation, and seismology due to their low cost, small size, and low power consumption. There is an urgent need to develop resonant accelerometer with high sensitivity, precision and robustness. Here, a zinc oxide resonant nano-accelerometer with high sensitivity has been designed and prototyped using zinc oxide nanowires. Within a device two nanowires were symmetrically placed close to a notched flexure to evaluate acceleration based on differential resonant frequencies. Additionally, microleverages were integrated in the accelerometer to enhance its sensitivity by amplifying the inertial force. High performance of the accelerometer has been demonstrated by the measured absolute sensitivity (16.818 kHz/g), bias instability (13.13 μg at 1.2 s integration time) and bandwidth (from 4.78 to 29.64 kHz), respectively. These results suggest that zinc oxide nanowires could be a candidate to develop future nanoelectromechanical resonant accelerometer potentially used for inertial navigation, tilt measurement, and geophysical measurements.

Date: 2024
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DOI: 10.1038/s41467-024-49145-9

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