Wafer-scale integration of two-dimensional perovskite oxides towards motion recognition

Ming Deng, Ziqing Li (), Shiyuan Liu, Xiaosheng Fang () and Limin Wu ()
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Ming Deng: Fudan University
Ziqing Li: Fudan University
Shiyuan Liu: Fudan University
Xiaosheng Fang: Fudan University
Limin Wu: Fudan University

Nature Communications, 2024, vol. 15, issue 1, 1-11

Abstract: Abstract Two-dimensional semiconductors have shown great potential for the development of advanced intelligent optoelectronic systems. Among them, two-dimensional perovskite oxides with compelling optoelectronic performance have been thriving in high-performance photodetection. However, harsh synthesis and defect chemistry severely limit their overall performance and further large-scale heterogeneous integration. Here, we report the wafer-scale integration of highly oriented nanosheets by introducing a charge-assisted oriented assembly film-formation process and confirm its universality and scalability. The shallow-trap dominance induced by structural optimization endows the device with a distinguished performance balance, including high photosensitivity close to that of single nanosheet units and fast response speed. An integrated ultra-flexible 256-pixel device demonstrates the versatility of material-to-substrate integration and conformal imaging functionality. Moreover, the device achieves efficient recognition of multidirectional motion trajectories with an accuracy of over 99.8%. Our work provides prescient insights into the large-area fabrication and utilization of 2D perovskite oxides in advanced optoelectronics.

Date: 2024
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DOI: 10.1038/s41467-024-52840-2

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