One-pot microfluidic fabrication of micro ceramic particles

Chenchen Zhou, Shuaishuai Liang, Bin Qi, Chenxu Liu and Nam-Joon Cho ()
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Chenchen Zhou: Nanyang Technological University
Shuaishuai Liang: University of Science and Technology Beijing
Bin Qi: University of Science and Technology Beijing
Chenxu Liu: Tsinghua University
Nam-Joon Cho: Nanyang Technological University

Nature Communications, 2024, vol. 15, issue 1, 1-12

Abstract: Abstract In the quest for miniaturization across technical disciplines, microscale ceramic blocks emerge as pivotal components, with performance critically dependent on precise scales and intricate shapes. Sharp-edged ceramic microparticles, applied from micromachining to microelectronics, require innovative fabrication techniques for high-throughput production while maintaining structural complexity and mechanical integrity. This study introduces a “one-pot microfluidic fabrication” system incorporating two device fabrication strategies, “groove & tongue” and sliding assembling, achieving an unprecedented array of microparticles with diverse, complex shapes and refined precision, outperforming traditional methods in production rate and quality. Optimally designed sintering profiles based on derivative thermogravimetry enhance microparticles’ shape retention and structural strength. Compression and scratch tests validate the superiority of microparticles, suggesting their practicability for diverse applications, such as precise micromachining, sophisticated microrobotics and delicate microsurgical tools. This advancement marks a shift in microscale manufacturing, offering a scalable solution to meet the demanding specifications of miniaturized technology components.

Date: 2024
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DOI: 10.1038/s41467-024-53016-8

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