On the longevity and inherent hermeticity of silicon-ICs: evaluation of bare-die and PDMS-coated ICs after accelerated aging and implantation studies

Kambiz Nanbakhsh, Ahmad Shah Idil, Callum Lamont, Csaba Dücső, Ömer Can Akgun, Domonkos Horváth, Kinga Tóth, Domokos Meszéna, István Ulbert, Federico Mazza, Timothy G. Constandinou, Wouter Serdijn, Anne Vanhoestenberghe, Nick Donaldson and Vasiliki Giagka ()
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Kambiz Nanbakhsh: Delft University of Technology
Ahmad Shah Idil: University College London
Callum Lamont: University College London
Csaba Dücső: HUN-REN
Ömer Can Akgun: Delft University of Technology
Domonkos Horváth: HUN-REN
Kinga Tóth: HUN-REN
Domokos Meszéna: HUN-REN
István Ulbert: HUN-REN
Federico Mazza: Imperial College London
Timothy G. Constandinou: Imperial College London
Wouter Serdijn: Delft University of Technology
Anne Vanhoestenberghe: University College London
Nick Donaldson: University College London
Vasiliki Giagka: Delft University of Technology

Nature Communications, 2025, vol. 16, issue 1, 1-17

Abstract: Abstract Silicon integrated circuits (ICs) are central to the next-generation miniature active neural implants, whether packaged in soft polymers for flexible bioelectronics or implanted as bare die for neural probes. These emerging applications bring the IC closer to the corrosive body environment, raising reliability concerns, particularly for chronic use. Here, we evaluate the inherent hermeticity of bare die ICs, and examine the potential of polydimethylsiloxane (PDMS), a moisture-permeable elastomer, as a standalone encapsulation material. For this aim, the electrical and material performance of ICs sourced from two foundries was evaluated through one-year accelerated in vitro and in vivo studies. ICs featured custom-designed test structures and were partially PDMS coated, creating two regions on each chip, uncoated “bare die” and “PDMS-coated”. During the accelerated in vitro study, ICs were electrically biased and periodically monitored. Results revealed stable electrical performance, indicating the unaffected operation of ICs even when directly exposed to physiological fluids. Despite this, material analysis revealed IC degradation in the bare regions. PDMS-coated regions, however, revealed limited degradation, making PDMS a suitable IC encapsulant for years-long implantation. Based on the new insights, guidelines are proposed that may enhance the longevity of implantable ICs, broadening their applications in the biomedical field.

Date: 2025
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DOI: 10.1038/s41467-024-55298-4

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