Far-field femtosecond laser-driven λ/73 super-resolution fabrication of 2D van der Waals NbOI2 nanostructures in ambient air

Yanchao Guan, Ye Ding, Yuqiang Fang (), Jingyi Li, Yanan Liu, Rui Wang, Juanyuan Hao, Hui Xie, Chengyan Xu, Liang Zhen, Yang Li () and Lijun Yang ()
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Yanchao Guan: Harbin Institute of Technology
Ye Ding: Harbin Institute of Technology
Yuqiang Fang: Shanghai Jiao Tong University
Jingyi Li: Harbin Institute of Technology
Yanan Liu: Harbin Institute of Technology
Rui Wang: Harbin Institute of Technology
Juanyuan Hao: Harbin Institute of Technology
Hui Xie: Harbin Institute of Technology
Chengyan Xu: Harbin Institute of Technology
Liang Zhen: Harbin Institute of Technology
Yang Li: Harbin Institute of Technology
Lijun Yang: Harbin Institute of Technology

Nature Communications, 2025, vol. 16, issue 1, 1-9

Abstract: Abstract The design and fabrication of ultrafine nanostructures in two-dimensional (2D) van der Waals materials are crucial for the functionalization of electronic devices. Here, we report the utilization of far-field femtosecond laser patterning to fabricate super-resolution nano-groove array (NGA) structures in 2D multilayer NbOI2 in ambient air, achieving groove widths as low as ~14.5 nm (~λ/73). The NGA structures maintain a well-defined single-crystal NbOI2 with amorphous Nb2O5 edges as narrow as 3.2 nm. The formation mechanism of NGA structure is confirmed to be associated with the coupled field of surface plasmon polariton periodic field and nano-groove-induced local near-field induced by femtosecond laser irradiation. Furthermore, the NGA-NbOI2 gas sensor exhibits NO2 sensing performance, with a rapid response time (5.1 s), which is attributed to the existence of abundant NbOI2-Nb2O5 heterojunctions. This approach will propel the further development of nano-lithography techniques for functional device applications of 2D materials.

Date: 2025
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DOI: 10.1038/s41467-025-59520-9

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