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Dual slow-light enhanced photothermal gas spectroscopy on a silicon chip

Kaiyuan Zheng, Zihang Peng, Hanyu Liao, Yijun Huang, Haihong Bao, Shuangxiang Zhao, Yu Zhang, Chuantao Zheng (), Yiding Wang and Wei Jin ()
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Kaiyuan Zheng: Jilin University, State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering
Zihang Peng: Jilin University, State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering
Hanyu Liao: The Hong Kong Polytechnic University, Department of Electrical and Electronic Engineering and Photonics Research Institute
Yijun Huang: Jilin University, State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering
Haihong Bao: The Hong Kong Polytechnic University, Department of Electrical and Electronic Engineering and Photonics Research Institute
Shuangxiang Zhao: The Hong Kong Polytechnic University, Department of Electrical and Electronic Engineering and Photonics Research Institute
Yu Zhang: Jilin University, State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering
Chuantao Zheng: Jilin University, State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering
Yiding Wang: Jilin University, State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering
Wei Jin: The Hong Kong Polytechnic University, Department of Electrical and Electronic Engineering and Photonics Research Institute

Nature Communications, 2025, vol. 16, issue 1, 1-10

Abstract: Abstract Integrated photonic sensors have attracted significant attention recently for their potential for high-density integration. However, they face challenges in sensing gases with high sensitivity due to weak light-gas interaction. Slow light, which dramatically intensifies light-matter interaction through spatial compression of optical energy, provides a promising solution. Herein, we demonstrate a dual slow-light scheme for enhancing the sensitivity of photothermal spectroscopy (PTS) with a suspended photonic crystal waveguide (PhCW) on a CMOS-compatible silicon platform. By tailoring the dispersion of the PhCW to generate structural slow light to enhance pump absorption and probe phase modulation, we achieve a photothermal efficiency of 3.6 × 10−4 rad·cm·ppm−1 · mW−1 · m−1, over 1 − 3 orders of magnitude higher than the strip waveguides and optical fibers. With a 1-mm-long sensing PhCW incorporated in a stabilized on-chip Mach-Zehnder interferometer with a footprint of 0.6 mm2, we demonstrate acetylene detection with a sensitivity of 1.4 × 10−6 in terms of noise-equivalent absorption and length product (NEA · L), the best among the reported photonic waveguide gas sensors to our knowledge. The dual slow-light enhanced PTS paves the way for integrated photonic gas sensors with high sensitivity, miniaturization, and cost-effective mass production.

Date: 2025
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DOI: 10.1038/s41467-025-65583-5

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