Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics

Cheng-Wei Cheng (), Kuen-Ting Shiu, Ning Li, Shu-Jen Han, Leathen Shi and Devendra K. Sadana
Additional contact information
Cheng-Wei Cheng: IBM T. J. Watson Research Center
Kuen-Ting Shiu: IBM T. J. Watson Research Center
Ning Li: IBM T. J. Watson Research Center
Shu-Jen Han: IBM T. J. Watson Research Center
Leathen Shi: IBM T. J. Watson Research Center
Devendra K. Sadana: IBM T. J. Watson Research Center

Nature Communications, 2013, vol. 4, issue 1, 1-7

Abstract: Abstract Epitaxial lift-off process enables the separation of III–V device layers from gallium arsenide substrates and has been extensively explored to avoid the high cost of III–V devices by reusing the substrates. Conventional epitaxial lift-off processes require several post-processing steps to restore the substrate to an epi-ready condition. Here we present an epitaxial lift-off scheme that minimizes the amount of post-etching residues and keeps the surface smooth, leading to direct reuse of the gallium arsenide substrate. The successful direct substrate reuse is confirmed by the performance comparison of solar cells grown on the original and the reused substrates. Following the features of our epitaxial lift-off process, a high-throughput technique called surface tension-assisted epitaxial lift-off was developed. In addition to showing full wafer gallium arsenide thin film transfer onto both rigid and flexible substrates, we also demonstrate devices, including light-emitting diode and metal-oxide-semiconductor capacitor, first built on thin active layers and then transferred to secondary substrates.

Date: 2013
References: Add references at CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
https://www.nature.com/articles/ncomms2583 Abstract (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:nat:natcom:v:4:y:2013:i:1:d:10.1038_ncomms2583

Ordering information: This journal article can be ordered from
https://www.nature.com/ncomms/

DOI: 10.1038/ncomms2583

Access Statistics for this article

Nature Communications is currently edited by Nathalie Le Bot, Enda Bergin and Fiona Gillespie

More articles in Nature Communications from Nature
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().