Replication of flexible polymer membranes with geometry-controllable nano-apertures via a hierarchical mould-based dewetting

Hyesung Cho, Junsoo Kim, Hyunchul Park, Jung Won Bang, Moon Seop Hyun, Yongjun Bae, Laura Ha, Do Yoon Kim, Seong Min Kang, Tae Jung Park, Soonmin Seo (), Mansoo Choi () and Kahp-Yang Suh
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Hyesung Cho: Seoul National University
Junsoo Kim: Seoul National University
Hyunchul Park: Seoul National University
Jung Won Bang: Seoul National University
Moon Seop Hyun: Measurement & Analysis Team, National Nanofab Center
Yongjun Bae: Seoul National University
Laura Ha: Interdisciplinary Program of Bioengineering, Seoul National University
Do Yoon Kim: College of BioNano Technology, Gachon University
Seong Min Kang: Seoul National University
Tae Jung Park: Chung-Ang University
Soonmin Seo: College of BioNano Technology, Gachon University
Mansoo Choi: Seoul National University
Kahp-Yang Suh: Seoul National University

Nature Communications, 2014, vol. 5, issue 1, 1-10

Abstract: Abstract Membranes with nano-apertures are versatile templates that possess a wide range of electronic, optical and biomedical applications. However, such membranes have been limited to silicon-based inorganic materials to utilize standard semiconductor processes. Here we report a new type of flexible and free-standing polymeric membrane with nano-apertures by exploiting high-wettability difference and geometrical reinforcement via multiscale, multilevel architecture. In the method, polymeric membranes with various pore sizes (50–800 nm) and shapes (dots, lines) are fabricated by a hierarchical mould-based dewetting of ultraviolet-curable resins. In particular, the nano-pores are monolithically integrated on a two-level hierarchical supporting layer, allowing for the rapid (

Date: 2014
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DOI: 10.1038/ncomms4137

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