Design rules for self-assembled block copolymer patterns using tiled templates

Jae-Byum Chang, Hong Kyoon Choi, Adam F. Hannon, Alfredo Alexander-Katz, Caroline A. Ross () and Karl K. Berggren ()
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Jae-Byum Chang: Massachusetts Institute of Technology
Hong Kyoon Choi: Massachusetts Institute of Technology
Adam F. Hannon: Massachusetts Institute of Technology
Alfredo Alexander-Katz: Massachusetts Institute of Technology
Caroline A. Ross: Massachusetts Institute of Technology
Karl K. Berggren: Massachusetts Institute of Technology

Nature Communications, 2014, vol. 5, issue 1, 1-9

Abstract: Abstract Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions and line segments in a single pattern have not been achieved by using sparse templates, because no systematic template design methods for achieving such complex patterns existed. To direct a complex pattern by using a sparse template, the template needs to encode the key information contained in the final pattern, without being a simple copy of the pattern. Here we develop a set of topographic template tiles consisting of square lattices of posts with a restricted range of geometric features. The block copolymer patterns resulting from all tile arrangements are determined. By combining tiles in different ways, it is possible to predict a relatively simple template that will direct the formation of non-trivial block copolymer patterns, providing a new template design method for a complex block copolymer pattern.

Date: 2014
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DOI: 10.1038/ncomms4305

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