Microsphere-assisted fabrication of high aspect-ratio elastomeric micropillars and waveguides

Jungwook Paek and Jaeyoun Kim ()
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Jungwook Paek: Iowa State University
Jaeyoun Kim: Iowa State University

Nature Communications, 2014, vol. 5, issue 1, 1-8

Abstract: Abstract High aspect-ratio micropillars are in strong demand for microtechnology, but their realization remains a difficult challenge, especially when attempted with soft materials. Here we present a direct drawing-based technique for fabricating micropillars with poly(dimethylsiloxane). Despite the material’s extreme softness, our technique enables routine realization of micropillars exceeding 2,000 μm in height and 100 in aspect-ratio. It also supports in situ integration of microspheres at the tips of the micropillars. As a validation of the new structure’s utility, we configure it into airflow sensors, in which the micropillars and microspheres function as flexible upright waveguides and self-aligned reflectors, respectively. High-level bending of the micropillar under an airflow and its optical read-out enables mm s−1 scale-sensing resolution. This new scheme, which uniquely integrates high aspect-ratio elastomeric micropillars and microspheres self-aligned to them, could widen the scope of soft material-based microdevice technology.

Date: 2014
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Persistent link: https://EconPapers.repec.org/RePEc:nat:natcom:v:5:y:2014:i:1:d:10.1038_ncomms4324

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DOI: 10.1038/ncomms4324

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