Nanomotor lithography

Jinxing Li, Wei Gao, Renfeng Dong, Allen Pei, Sirilak Sattayasamitsathit and Joseph Wang ()
Additional contact information
Jinxing Li: University of California San Diego
Wei Gao: University of California San Diego
Renfeng Dong: University of California San Diego
Allen Pei: University of California San Diego
Sirilak Sattayasamitsathit: University of California San Diego
Joseph Wang: University of California San Diego

Nature Communications, 2014, vol. 5, issue 1, 1-7

Abstract: Abstract The rapid miniaturization of devices and machines has fuelled the evolution of advanced fabrication techniques. However, the complexity and high cost of the state-of-the-art high-resolution lithographic systems are prompting unconventional routes for nanoscale patterning. Inspired by natural nanomachines, synthetic nanomotors have recently demonstrated remarkable performance and functionality. Here we report a new nano-patterning approach, named ‘nanomotor lithography’, which translates the autonomous movement trajectories of nanomotors into controlled surface features. As a proof of principle, we use metallic nanowire motors as mobile nanomasks and Janus sphere motors as near-field nanolenses to manipulate light beams for generating a myriad of nanoscale features through modular nanomotor design. The complex spatially defined nanofeatures using these dynamic nanoscale optical elements can be achieved through organized assembly and remote guidance of multiple nanomotors. Such ability to transform predetermined paths of moving nanomachines to defined surface patterns provides a unique nanofabrication platform for creating diverse nanodevices.

Date: 2014
References: Add references at CitEc
Citations:

Downloads: (external link)
https://www.nature.com/articles/ncomms6026 Abstract (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:nat:natcom:v:5:y:2014:i:1:d:10.1038_ncomms6026

Ordering information: This journal article can be ordered from
https://www.nature.com/ncomms/

DOI: 10.1038/ncomms6026

Access Statistics for this article

Nature Communications is currently edited by Nathalie Le Bot, Enda Bergin and Fiona Gillespie

More articles in Nature Communications from Nature
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().