Highly deformable liquid-state heterojunction sensors

Hiroki Ota, Kevin Chen, Yongjing Lin, Daisuke Kiriya, Hiroshi Shiraki, Zhibin Yu, Tae-Jun Ha and Ali Javey ()
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Hiroki Ota: University of California, Berkeley
Kevin Chen: University of California, Berkeley
Yongjing Lin: University of California, Berkeley
Daisuke Kiriya: University of California, Berkeley
Hiroshi Shiraki: University of California, Berkeley
Zhibin Yu: University of California, Berkeley
Tae-Jun Ha: University of California, Berkeley
Ali Javey: University of California, Berkeley

Nature Communications, 2014, vol. 5, issue 1, 1-9

Abstract: Abstract Mechanically deformable devices and sensors enable conformal coverage of electronic systems on curved and soft surfaces. Sensors utilizing liquids confined in soft templates as the sensing component present the ideal platform for such applications, as liquids are inherently more deformable than solids. However, to date, liquid-based devices have been limited to metal lines based on a single-liquid component given the difficulty in the fabrication of liquid-based junctions due to intermixing. Here, we demonstrate a robust platform for the fabrication of liquid–liquid ‘heterojunction’ devices, presenting an important advancement towards the realization of liquid-state electronic systems. The device architecture and fabrication scheme we present are generic for different sensing liquids, enabling demonstration of sensors responsive to different stimuli. As a proof of concept, we demonstrate temperature, humidity and oxygen sensors by using different ionic liquids, exhibiting high sensitivity with excellent mechanical deformability arising from the inherent property of the liquid phase.

Date: 2014
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DOI: 10.1038/ncomms6032

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