High-resolution nanotransfer printing applicable to diverse surfaces via interface-targeted adhesion switching

Jae Won Jeong, Se Ryeun Yang, Yoon Hyung Hur, Seong Wan Kim, Kwang Min Baek, Soonmin Yim, Hyun-Ik Jang, Jae Hong Park, Seung Yong Lee, Chong-Ook Park and Yeon Sik Jung ()
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Jae Won Jeong: Korea Advanced Institute of Science and Technology (KAIST)
Se Ryeun Yang: Korea Advanced Institute of Science and Technology (KAIST)
Yoon Hyung Hur: Korea Advanced Institute of Science and Technology (KAIST)
Seong Wan Kim: Korea Advanced Institute of Science and Technology (KAIST)
Kwang Min Baek: Korea Advanced Institute of Science and Technology (KAIST)
Soonmin Yim: Korea Advanced Institute of Science and Technology (KAIST)
Hyun-Ik Jang: Korea National NanoFab Center
Jae Hong Park: Korea National NanoFab Center
Seung Yong Lee: Center for Materials Architecturing, Korea Institute of Science and Technology (KIST)
Chong-Ook Park: Korea Advanced Institute of Science and Technology (KAIST)
Yeon Sik Jung: Korea Advanced Institute of Science and Technology (KAIST)

Nature Communications, 2014, vol. 5, issue 1, 1-12

Abstract: Abstract Nanotransfer printing technology offers outstanding simplicity and throughput in the fabrication of transistors, metamaterials, epidermal sensors and other emerging devices. Nevertheless, the development of a large-area sub-50 nm nanotransfer printing process has been hindered by fundamental reliability issues in the replication of high-resolution templates and in the release of generated nanostructures. Here we present a solvent-assisted nanotransfer printing technique based on high-fidelity replication of sub-20 nm patterns using a dual-functional bilayer polymer thin film. For uniform and fast release of nanostructures on diverse receiver surfaces, interface-specific adhesion control is realized by employing a polydimethylsiloxane gel pad as a solvent-emitting transfer medium, providing unusual printing capability even on biological surfaces such as human skin and fruit peels. Based on this principle, we also demonstrate reliable printing of high-density metallic nanostructures for non-destructive and rapid surface-enhanced Raman spectroscopy analyses and for hydrogen detection sensors with excellent responsiveness.

Date: 2014
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DOI: 10.1038/ncomms6387

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