Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography

M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Krüger, J. -H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt and S. Reitzenstein ()
Additional contact information
M. Gschrey: Institut für Festkörperphysik, Technische Universität Berlin
A. Thoma: Institut für Festkörperphysik, Technische Universität Berlin
P. Schnauber: Institut für Festkörperphysik, Technische Universität Berlin
M. Seifried: Institut für Festkörperphysik, Technische Universität Berlin
R. Schmidt: Institut für Festkörperphysik, Technische Universität Berlin
B. Wohlfeil: Zuse-Institut Berlin (ZIB)
L. Krüger: Institut für Festkörperphysik, Technische Universität Berlin
J. -H. Schulze: Institut für Festkörperphysik, Technische Universität Berlin
T. Heindel: Institut für Festkörperphysik, Technische Universität Berlin
S. Burger: Zuse-Institut Berlin (ZIB)
F. Schmidt: Zuse-Institut Berlin (ZIB)
A. Strittmatter: Institut für Festkörperphysik, Technische Universität Berlin
S. Rodt: Institut für Festkörperphysik, Technische Universität Berlin
S. Reitzenstein: Institut für Festkörperphysik, Technische Universität Berlin

Nature Communications, 2015, vol. 6, issue 1, 1-8

Abstract: Abstract The success of advanced quantum communication relies crucially on non-classical light sources emitting single indistinguishable photons at high flux rates and purity. We report on deterministically fabricated microlenses with single quantum dots inside which fulfil these requirements in a flexible and robust quantum device approach. In our concept we combine cathodoluminescence spectroscopy with advanced in situ three-dimensional electron-beam lithography at cryogenic temperatures to pattern monolithic microlenses precisely aligned to pre-selected single quantum dots above a distributed Bragg reflector. We demonstrate that the resulting deterministic quantum-dot microlenses enhance the photon-extraction efficiency to (23±3)%. Furthermore we prove that such microlenses assure close to pure emission of triggered single photons with a high degree of photon indistinguishability up to (80±7)% at saturation. As a unique feature, both single-photon purity and photon indistinguishability are preserved at high excitation power and pulsed excitation, even above saturation of the quantum emitter.

Date: 2015
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DOI: 10.1038/ncomms8662

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