Scalable fabrication of a hybrid field-effect and acousto-electric device by direct growth of monolayer MoS2/LiNbO3

Edwin Preciado, Florian J.R. Schülein, Ariana E. Nguyen, David Barroso, Miguel Isarraraz, Gretel von Son, I-Hsi Lu, Wladislaw Michailow, Benjamin Möller, Velveth Klee, John Mann, Achim Wixforth, Ludwig Bartels () and Hubert J. Krenner ()
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Edwin Preciado: Chemistry, Materials Science & Engineering and Electrical Engineering, University of California
Florian J.R. Schülein: Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg
Ariana E. Nguyen: Chemistry, Materials Science & Engineering and Electrical Engineering, University of California
David Barroso: Chemistry, Materials Science & Engineering and Electrical Engineering, University of California
Miguel Isarraraz: Chemistry, Materials Science & Engineering and Electrical Engineering, University of California
Gretel von Son: Chemistry, Materials Science & Engineering and Electrical Engineering, University of California
I-Hsi Lu: Chemistry, Materials Science & Engineering and Electrical Engineering, University of California
Wladislaw Michailow: Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg
Benjamin Möller: Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg
Velveth Klee: Chemistry, Materials Science & Engineering and Electrical Engineering, University of California
John Mann: Pepperdine University
Achim Wixforth: Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg
Ludwig Bartels: Chemistry, Materials Science & Engineering and Electrical Engineering, University of California
Hubert J. Krenner: Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg

Nature Communications, 2015, vol. 6, issue 1, 1-8

Abstract: Abstract Lithium niobate is the archetypical ferroelectric material and the substrate of choice for numerous applications including surface acoustic wave radio frequencies devices and integrated optics. It offers a unique combination of substantial piezoelectric and birefringent properties, yet its lack of optical activity and semiconducting transport hamper application in optoelectronics. Here we fabricate and characterize a hybrid MoS2/LiNbO3 acousto-electric device via a scalable route that uses millimetre-scale direct chemical vapour deposition of MoS2 followed by lithographic definition of a field-effect transistor structure on top. The prototypical device exhibits electrical characteristics competitive with MoS2 devices on silicon. Surface acoustic waves excited on the substrate can manipulate and probe the electrical transport in the monolayer device in a contact-free manner. We realize both a sound-driven battery and an acoustic photodetector. Our findings open directions to non-invasive investigation of electrical properties of monolayer films.

Date: 2015
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DOI: 10.1038/ncomms9593

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