Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges

Sung-Ho Shin, Sangyoon Ji, Seiho Choi, Kyoung-Hee Pyo, Byeong Wan An, Jihun Park, Joohee Kim, Ju-Young Kim, Ki-Suk Lee, Soon-Yong Kwon, Jaeyeong Heo, Byong-Guk Park and Jang-Ung Park ()
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Sung-Ho Shin: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Sangyoon Ji: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Seiho Choi: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Kyoung-Hee Pyo: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Byeong Wan An: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Jihun Park: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Joohee Kim: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Ju-Young Kim: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Ki-Suk Lee: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Soon-Yong Kwon: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)
Jaeyeong Heo: Chonnam National University
Byong-Guk Park: KAIST
Jang-Ung Park: School of Materials Science and Engineering, SDC-UNIST Research Center, Ulsan National Institute of Science and Technology (UNIST)

Nature Communications, 2017, vol. 8, issue 1, 1-8

Abstract: Abstract Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and health-monitoring devices. Although existing pressure sensors display high sensitivities, they can only be used for specific purposes due to the narrow range of detectable pressure (under tens of kPa) and the difficulty of forming highly integrated arrays. However, it is essential to develop tactile pressure sensors with a wide pressure range in order to use them for diverse application areas including medical diagnosis, robotics or automotive electronics. Here we report an unconventional approach for fabricating fully integrated active-matrix arrays of pressure-sensitive graphene transistors with air-dielectric layers simply formed by folding two opposing panels. Furthermore, this realizes a wide tactile pressure sensing range from 250 Pa to ∼3 MPa. Additionally, fabrication of pressure sensor arrays and transparent pressure sensors are demonstrated, suggesting their substantial promise as next-generation electronics.

Date: 2017
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DOI: 10.1038/ncomms14950

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