Dual-comb spectroscopic ellipsometry

Takeo Minamikawa (), Yi-Da Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo Iwata and Takeshi Yasui
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Takeo Minamikawa: Tokushima University
Yi-Da Hsieh: Tokushima University
Kyuki Shibuya: Tokushima University
Eiji Hase: Tokushima University
Yoshiki Kaneoka: Tokushima University
Sho Okubo: ERATO Intelligent Optical Synthesizer (IOS) Project
Hajime Inaba: ERATO Intelligent Optical Synthesizer (IOS) Project
Yasuhiro Mizutani: ERATO Intelligent Optical Synthesizer (IOS) Project
Hirotsugu Yamamoto: ERATO Intelligent Optical Synthesizer (IOS) Project
Tetsuo Iwata: Tokushima University
Takeshi Yasui: Tokushima University

Nature Communications, 2017, vol. 8, issue 1, 1-8

Abstract: Abstract Spectroscopic ellipsometry is a means of investigating optical and dielectric material responses. Conventional spectroscopic ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine spectroscopic ellipsometry with dual-comb spectroscopy, namely, dual-comb spectroscopic ellipsometry. Dual-comb spectroscopic ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10−5 nm throughout the spectral range of 1514–1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples.

Date: 2017
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DOI: 10.1038/s41467-017-00709-y

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