Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass
Pengfei Yang,
Xiaolong Zou,
Zhepeng Zhang,
Min Hong,
Jianping Shi,
Shulin Chen,
Jiapei Shu,
Liyun Zhao,
Shaolong Jiang,
Xiebo Zhou,
Yahuan Huan,
Chunyu Xie,
Peng Gao,
Qing Chen,
Qing Zhang,
Zhongfan Liu and
Yanfeng Zhang ()
Additional contact information
Pengfei Yang: Peking University
Xiaolong Zou: Tsinghua University
Zhepeng Zhang: Peking University
Min Hong: Peking University
Jianping Shi: Peking University
Shulin Chen: Peking University
Jiapei Shu: Peking University
Liyun Zhao: Peking University
Shaolong Jiang: Peking University
Xiebo Zhou: Peking University
Yahuan Huan: Peking University
Chunyu Xie: Peking University
Peng Gao: Peking University
Qing Chen: Peking University
Qing Zhang: Peking University
Zhongfan Liu: Peking University
Yanfeng Zhang: Peking University
Nature Communications, 2018, vol. 9, issue 1, 1-10
Abstract:
Abstract Monolayer transition metal dichalcogenides (TMDs) have become essential two-dimensional materials for their perspectives in engineering next-generation electronics. For related applications, the controlled growth of large-area uniform monolayer TMDs is crucial, while it remains challenging. Herein, we report the direct synthesis of 6-inch uniform monolayer molybdenum disulfide on the solid soda-lime glass, through a designed face-to-face metal-precursor supply route in a facile chemical vapor deposition process. We find that the highly uniform monolayer film, with the composite domains possessing an edge length larger than 400 µm, can be achieved within a quite short time of 8 min. This highly efficient growth is proven to be facilitated by sodium catalysts that are homogenously distributed in glass, according to our experimental facts and density functional theory calculations. This work provides insights into the batch production of highly uniform TMD films on the functional glass substrate with the advantages of low cost, easily transferrable, and compatible with direct applications.
Date: 2018
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Persistent link: https://EconPapers.repec.org/RePEc:nat:natcom:v:9:y:2018:i:1:d:10.1038_s41467-018-03388-5
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DOI: 10.1038/s41467-018-03388-5
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