A high-brightness large-diameter graphene coated point cathode field emission electron source
Xiuyuan Shao,
Avinash Srinivasan,
Wei Kean Ang and
Anjam Khursheed ()
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Xiuyuan Shao: National University of Singapore
Avinash Srinivasan: National University of Singapore
Wei Kean Ang: National University of Singapore
Anjam Khursheed: National University of Singapore
Nature Communications, 2018, vol. 9, issue 1, 1-8
Abstract:
Abstract There have been several long-standing problems of cold field emission sources for electron microscopy and lithography that have prevented their widespread use, such as their inherent ultrahigh vacuum condition requirement ( 10−8 torr) and has an ultralow work function value of 1.10 ± 0.07 eV. It has an estimated reduced brightness value of 1.46 × 109 A m−2 sr−1 V−1 for cathode tip-radius of 170 nm and the measured energy spread ranges from 0.246 eV to 0.420 eV for a tip radii range of 260 nm to 500 nm, which is comparable to state-of-the-art conventional cold field emission sources.
Date: 2018
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DOI: 10.1038/s41467-018-03721-y
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