Industrial-scale deposition of nanocrystalline silicon oxide for 26.4%-efficient silicon heterojunction solar cells with copper electrodes

Cao Yu, Kun Gao, Chen-Wei Peng, Chenran He, Shibo Wang, Wei Shi, Vince Allen, Jiteng Zhang, Dengzhi Wang, Gangyu Tian, Yifan Zhang, Wenzhu Jia, Yuanhong Song, Youzhong Hu, Jack Colwell, Chunfang Xing, Qing Ma, Huiting Wu, Liangyuan Guo, Gangqiang Dong, Hao Jiang, Haihong Wu, Xinyu Wang, Dacheng Xu, Kun Li, Jun Peng, Wenzhu Liu, Daniel Chen, Alison Lennon (), Xinmin Cao, Stefaan Wolf, Jian Zhou (), Xinbo Yang () and Xiaohong Zhang ()
Additional contact information
Cao Yu: Suzhou Maxwell Technologies Co., Ltd.
Kun Gao: Soochow University
Chen-Wei Peng: Suzhou Maxwell Technologies Co., Ltd.
Chenran He: Suzhou Maxwell Technologies Co., Ltd.
Shibo Wang: Soochow University
Wei Shi: Soochow University
Vince Allen: SunDrive Solar Pty., Ltd.
Jiteng Zhang: Suzhou Maxwell Technologies Co., Ltd.
Dengzhi Wang: Suzhou Maxwell Technologies Co., Ltd.
Gangyu Tian: Suzhou Maxwell Technologies Co., Ltd.
Wenzhu Jia: Southwest University
Yuanhong Song: Dalian University of Technology
Youzhong Hu: SunDrive Solar Pty., Ltd.
Jack Colwell: SunDrive Solar Pty., Ltd.
Chunfang Xing: Soochow University
Qing Ma: Soochow University
Huiting Wu: SunDrive Solar Pty., Ltd.
Liangyuan Guo: SunDrive Solar Pty., Ltd.
Gangqiang Dong: Suzhou Maxwell Technologies Co., Ltd.
Hao Jiang: Suzhou Maxwell Technologies Co., Ltd.
Haihong Wu: Suzhou Maxwell Technologies Co., Ltd.
Xinyu Wang: Soochow University
Dacheng Xu: Soochow University
Kun Li: Soochow University
Jun Peng: Soochow University
Wenzhu Liu: Chinese Academy of Sciences
Daniel Chen: SunDrive Solar Pty., Ltd.
Alison Lennon: SunDrive Solar Pty., Ltd.
Xinmin Cao: Suzhou Maxwell Technologies Co., Ltd.
Stefaan Wolf: King Abdullah University of Science and Technology (KAUST)
Jian Zhou: Suzhou Maxwell Technologies Co., Ltd.
Xinbo Yang: Soochow University
Xiaohong Zhang: Soochow University

Nature Energy, 2023, vol. 8, issue 12, 1375-1385

Abstract: Abstract To unlock the full performance potential of silicon heterojunction solar cells requires reductions of parasitic absorption and shadowing losses. Yet the translation of the hydrogenated nanocrystalline silicon oxide (nc-SiOx:H) window layer and copper-plated electrodes to a cost-effective and scalable production-relevant context remains one of the largest roadblocks towards mainstream adoption of silicon heterojunction technology. Here we address the first challenge by developing an industrial-scale high-frequency plasma-enhanced chemical vapour deposition system with a minimized standing wave effect, enabling the deposition of doped nc-SiOx:H with excellent electron selectivity, low parasitic absorption and high uniformity. Next, we demonstrate seed-free copper plating, resulting in grids with a high aspect ratio and low metal fraction. By implementing the doped nc-SiOx:H window layer, certified efficiencies of 25.98% and 26.41% are obtained for M6-size bifacial silicon heterojunction devices with screen-printed silver electrodes and copper-plated electrodes, respectively. These results underline the performance potential of silicon heterojunction technology and lower the threshold towards their mass manufacturing.

Date: 2023
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DOI: 10.1038/s41560-023-01388-4

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