Structure and Properties of Zrtio4 Thin Films Prepared by Reactive Magnetron Co-Sputtering Without Heating

Jindawan Thammapreecha (), Alongkot Treetong (), Bundit Putasaeng (), Nirun Witit-Anun (), Surasing Chaiyakun () and Pichet Limsuwan ()

International Journal of Natural Sciences Research, 2017, vol. 5, issue 3, 50-54

Abstract: ZrTiO4 thin films were deposited by reactive dc magnetron co-sputtering method without heating. The crystal structure, surface morphology, thickness, optical and dielectric properties of the thin films were investigated. At sputtering currents above 2.0 A without heating ZrTiO4 thin film was crystallization of the orthorhombic phase (111). The values of refractive index were ranged between 2.01 and 2.23 (at 650 nm). The optical packing density values were ranged between 0.85 and 0.96. From this study, it was observed that the refractive index values were strongly dependent on packing densities. The high dielectric constant width decreases from 74.3 to 43.3 when sputtering current increases, which is higher than other research.

Keywords: Zrtio4; Thin films; Optical properties; Dielectric constant; Co-sputtering (search for similar items in EconPapers)
Date: 2017
References: Add references at CitEc
Citations:

Downloads: (external link)
https://archive.conscientiabeam.com/index.php/63/article/view/2367/3557 (application/pdf)
https://archive.conscientiabeam.com/index.php/63/article/view/2367/5429 (text/html)

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:pkp:ijonsr:v:5:y:2017:i:3:p:50-54:id:2367

Access Statistics for this article

More articles in International Journal of Natural Sciences Research from Conscientia Beam
Bibliographic data for series maintained by Dim Michael ().