Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy

John P Giannini, Andrew G York and Hari Shroff

PLOS ONE, 2017, vol. 12, issue 10, 1-14

Abstract: We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is weakly nonlinear, the observed behavior deviates from expectations, and we iteratively improve our input to minimize this deviation. This allows customizable MEMS angle vs. time with

Date: 2017
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Persistent link: https://EconPapers.repec.org/RePEc:plo:pone00:0185849

DOI: 10.1371/journal.pone.0185849

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