The importance of non-local shadowing for the topography evolution of a-C:H films grown by toluene based plasma enhanced chemical vapor deposition

C. Hormann (), S. Meier and M. Moseler

The European Physical Journal B: Condensed Matter and Complex Systems, 2009, vol. 69, issue 2, 187-194

Keywords: 81.15.Aa Theory and models of film growth; 81.15.Gh Chemical vapor deposition (search for similar items in EconPapers)
Date: 2009
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DOI: 10.1140/epjb/e2009-00131-6

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