Analytical Modelling of Hexagonal Shaped Capacitive Micromachined Ultrasonic Transducer

Rashmi Sharma, Rekha Agarwal, Ashwani Kumar Dubey () and Anil Arora
Additional contact information
Rashmi Sharma: Amity School of Engineering & Technology
Rekha Agarwal: Amity School of Engineering & Technology
Ashwani Kumar Dubey: Amity University
Anil Arora: Thapar University

International Journal of System Assurance Engineering and Management, 2021, vol. 12, issue 2, No 4, 252-262

Abstract: Abstract Background For ultrasonic signal generation and detection, the Capacitive Micromachined Ultrasonic Transducers (CMUTs), constructed using semiconductor fabrication processes are basically Microelectromechanical Systems based structures. Utilizing the semiconductor technology, the CMUTs can provide improved bandwidth, high transduction efficiency, ease of batch production etc. in contrast to piezoelectric transducers. Objective The CMUTs can be constructed in various possible geometries like square, rectangular, circular, and hexagonal. It has been found that CMUT with circular geometry provides optimum performance but has the disadvantage of area wastage in array construction due to voids in between the devices. Hence, the hexagonal CMUT is modelled and analyzed with circular CMUT. Method The Kirchhoff’s thin plate theory is employed for novel analytical model of hexagonal CMUT. Result The results comparison is found similar with the circular CMUT with 13.42% of more wafer area utilization. Conclusion The proposed analytical model provides a cheaper design tool for the researchers with highly reduced simulation time.

Keywords: CMUT; Ultrasonic transducer; Collapse voltage; Acoustic pressure (search for similar items in EconPapers)
Date: 2021
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
http://link.springer.com/10.1007/s13198-020-01046-y Abstract (text/html)
Access to the full text of the articles in this series is restricted.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:spr:ijsaem:v:12:y:2021:i:2:d:10.1007_s13198-020-01046-y

Ordering information: This journal article can be ordered from
http://www.springer.com/engineering/journal/13198

DOI: 10.1007/s13198-020-01046-y

Access Statistics for this article

International Journal of System Assurance Engineering and Management is currently edited by P.K. Kapur, A.K. Verma and U. Kumar

More articles in International Journal of System Assurance Engineering and Management from Springer, The Society for Reliability, Engineering Quality and Operations Management (SREQOM),India, and Division of Operation and Maintenance, Lulea University of Technology, Sweden
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().