Improvement in inductance and Q-factor by laser microstructuring of ferromagnetic on-chip thin film inductors

Srikanth Itapu, Daniel G. Georgiev and Vijay Devabhaktuni

Journal of Electromagnetic Waves and Applications, 2015, vol. 29, issue 12, 1547-1556

Abstract: In this work, we examine the potential improvement in inductance (L) and quality factor (Q) of on-chip ferromagnetic thin film inductors through the formation of conical microstructures by localized ultraviolet laser irradiation on ferromagnetic thin film. Parameters affecting L and Q, and arising from the surface modification upon laser irradiation include thickness of the film, size, and density of the structures. The thickness of the film is optimized to 0.2 μm, and at least 18% increase in inductance and 25% increase in Q-factor for NiFe thin film in comparison to the conventional spiral inductor is expected. L and Q values of NiFe films with and without microstructuring are compared, and a 7% increase is predicted for the microstrucired film. The proposed fabrication process, including the laser microstructuring technique, is likely to provide a significant flexibility, cost effectiveness and even better parameters, if other material systems are considered.

Date: 2015
References: Add references at CitEc
Citations:

Downloads: (external link)
http://hdl.handle.net/10.1080/09205071.2015.1047001 (text/html)
Access to full text is restricted to subscribers.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:taf:tewaxx:v:29:y:2015:i:12:p:1547-1556

Ordering information: This journal article can be ordered from
http://www.tandfonline.com/pricing/journal/tewa20

DOI: 10.1080/09205071.2015.1047001

Access Statistics for this article

Journal of Electromagnetic Waves and Applications is currently edited by Mohamad Abou El-Nasr and Pankaj Kumar Choudhury

More articles in Journal of Electromagnetic Waves and Applications from Taylor & Francis Journals
Bibliographic data for series maintained by Chris Longhurst ().