Design and analysis of a fiber-optic deep-etched silicon photonic crystal temperature sensor

Sanaz Zarei

Journal of Electromagnetic Waves and Applications, 2019, vol. 33, issue 2, 226-235

Abstract: A novel silicon fiber-optic temperature sensor based on a 1D photonic crystal is theoretically discussed in this paper. The sensing element consists of a 1D photonic crystal with a central defect at the end of a U-groove that can be created in a silicon substrate by silicon deep etching which facilitates the integration of fiber-optic and sensor in a single silicon die. Temperature variations can be monitored by scanning the shift in wavelength of reflection peak, which is induced by the thermo-optic effect and thermal expansion effect. This sensing configuration shows a nearly linear temperature response over the large temperature range of 0–200°C with a sensitivity of 68 pm/°C that is seven times better than the conventional FBG sensors.

Date: 2019
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DOI: 10.1080/09205071.2018.1536564

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