Allocating metrology capacity to multiple heterogeneous machines

Stéphane Dauzère-Pérès, Michael Hassoun and Alejandro Sendon

International Journal of Production Research, 2016, vol. 54, issue 20, 6082-6091

Abstract: The measurement of lots to check process quality is crucial but also a non-added value operation in manufacturing systems. This paper is motivated by semiconductor manufacturing, where metrology tools are expensive, thus limiting metrology capacity which must be optimally used. In a context where multiple heterogeneous machines are sharing a common metrology workshop, the problem of minimising risk while considering metrology capacity arises. An integer linear programming (ILP) model is presented, which corresponds to a multiple-choice knapsack problem. Simple rounding heuristics are proposed, whose results on randomly generated instances are compared with the optimal solutions obtained using a standard solver on the ILP. Additionally, numerical experiments on industrial data are presented and discussed.

Date: 2016
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DOI: 10.1080/00207543.2016.1187775

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