Big data analytics for forecasting cycle time in semiconductor wafer fabrication system

Junliang Wang and Jie Zhang

International Journal of Production Research, 2016, vol. 54, issue 23, 7231-7244

Abstract: In order to improve the prompt delivery reliability of the semiconductor wafer fabrication system, a big data analytics (BDA) is designed to predict wafer lots’ cycle time (CT), which is composed by four parts: data acquisition, data pre-processing, data analysing and data prediction. Firstly, the candidate feature set is constructed to collecting all features by analysing the material flow of wafer foundry. Subsequently, a data pre-processing technique is designed to extract, transform and load data from wafer lot transactions data-set. In addition, a conditional mutual information-based feature selection process is proposed to select key feature subset to reduce the dimension of data-set through data analysing without pre-knowledge. To handle the large volumes of data, a concurrent forecasting model is designed to predict the CT of wafer lots in parallel as well. According to the numerical analysis, the predict accuracy of the presented BDA improves clearly with the increase in data size. And, in the large-scale data-set, the BDA has higher accuracy than linear regression and back-propagation network in CT forecasting.

Date: 2016
References: View complete reference list from CitEc
Citations: View citations in EconPapers (12)

Downloads: (external link)
http://hdl.handle.net/10.1080/00207543.2016.1174789 (text/html)
Access to full text is restricted to subscribers.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:taf:tprsxx:v:54:y:2016:i:23:p:7231-7244

Ordering information: This journal article can be ordered from
http://www.tandfonline.com/pricing/journal/TPRS20

DOI: 10.1080/00207543.2016.1174789

Access Statistics for this article

International Journal of Production Research is currently edited by Professor A. Dolgui

More articles in International Journal of Production Research from Taylor & Francis Journals
Bibliographic data for series maintained by Chris Longhurst ().