A job-priority based soft scheduling approach for uncertain work area scheduling in Semiconductor Manufacturing

Huaxing Zhong, Min Liu and La Bao

International Journal of Production Research, 2022, vol. 60, issue 16, 5012-5028

Abstract: This paper studies the uncertain scheduling problem of the oxidation/deposition/diffusion work area in semiconductor manufacturing, where fluctuations in arrival times and processing times are considered. To overcome the shortcomings of the conventional schedule, which has a fixed processing machine and starting time for each operation, we design a new form of schedule called the job-priority based soft schedule. Its basic idea is to assign global priority to each job in advance, and to make remaining decisions (including batch formation, machine assignment and real-time dispatching) in the process of implementing the initial soft schedule. Then we develop a job-priority based soft scheduling approach that involves two layers: (1) in the offline optimisation layer, an initial soft schedule is obtained by a proposed hybrid harmony search algorithm; (2) in the online dispatching layer, the remaining decisions are made in real time by a designed online heuristic rule. The comparative experimental results demonstrate that the two-layer soft scheduling mechanism can effectively adapt to an uncertain production environment due to its integration of the global optimisation perspective and local flexibility.

Date: 2022
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DOI: 10.1080/00207543.2021.1948134

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