Joint optimisation of uncertain distributed manufacturing and preventive maintenance for semiconductor wafers considering multi-energy complementary

Jun Dong and Chunming Ye

International Journal of Production Research, 2023, vol. 61, issue 9, 3029-3050

Abstract: Aiming at the joint optimisation problem of uncertain distributed manufacturing and preventive maintenance (PM) for semiconductor wafers considering multi-energy complementary (UDMPM-MEC), a bi-level integrated scheduling model is constructed with interval makespan, total interval carbon emissions and total interval cost as the optimisation objectives. The upper model is used to obtain the joint optimisation scheduling scheme of distributed manufacturing and PM, and the lower model determines the energy allocation scheme on this basis. Given the problem characteristics, we propose an improved multi-objective whale swarm algorithm (IMOWSA). By designing jobs-to-factories allocation strategy, synchronous scheduling maintenance strategy, multi-energy complementary energy allocation decoding strategy, individual distance calculation strategy, multi-neighbourhood search strategy and deduplication strategy, the local and global search are effectively balanced, and the convergence precision is improved. A large number of simulation experiments and comparative analyses show that the IMOWSA algorithm is feasible and effective to solve this problem.

Date: 2023
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DOI: 10.1080/00207543.2022.2075292

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