Status of Ion Beam Modification and Analysis of Materials at STU MTF

Dobrovodský Jozef (), Vaňa Dušan (), Beňo Matúš (), Závacká Anna (), Muška Martin () and Riedlmajer Róbert ()
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Dobrovodský Jozef: Slovak University Of Technology In Bratislava, Faculty Of Materials Science And Technology In Trnava, Advanced Technologies Research Institute, Ulica Jána Bottu 2781/25, 917 24Trnava, Slovak Republic
Vaňa Dušan: Slovak University Of Technology In Bratislava, Faculty Of Materials Science And Technology In Trnava, Advanced Technologies Research Institute, Ulica Jána Bottu 2781/25, 917 24Trnava, Slovak Republic
Beňo Matúš: Slovak University Of Technology In Bratislava, Faculty Of Materials Science And Technology In Trnava, Advanced Technologies Research Institute, Ulica Jána Bottu 2781/25, 917 24Trnava, Slovak Republic
Závacká Anna: Slovak University Of Technology In Bratislava, Faculty Of Materials Science And Technology In Trnava, Advanced Technologies Research Institute, Ulica Jána Bottu 2781/25, 917 24Trnava, Slovak Republic
Muška Martin: Slovak University Of Technology In Bratislava, Faculty Of Materials Science And Technology In Trnava, Advanced Technologies Research Institute, Ulica Jána Bottu 2781/25, 917 24Trnava, Slovak Republic
Riedlmajer Róbert: Slovak University Of Technology In Bratislava, Faculty Of Materials Science And Technology In Trnava, Advanced Technologies Research Institute, Ulica Jána Bottu 2781/25, 917 24Trnava, Slovak Republic

Research Papers Faculty of Materials Science and Technology Slovak University of Technology, 2018, vol. 26, issue 43, 9-16

Abstract: The new Ion Beam Centre (IBC) equipped with 6 MV tandem ion accelerator and 500 kV ion implanter systems was built at the Slovak University of Technology, Faculty of Materials Science and Technology (STU MTF). The facility provides Ion Beam Modification of Materials (IBMM) and Ion Beam Analysis (IBA), which includes Rutherford Backscattering Spectrometry (RBS), Particle Induced X-ray Analysis (PIXE), Elastic Recoil Spectrometry (ERDA) and Nuclear Reaction Analysis (NRA). Presented are selected experimental procedures carried out in the IBC during the first year of operation. They present examples of a typical IBA performed, such as thin film characterisation in nm to tens of µm range, elemental depth profiles and sensitivity to the light elements enhancement by non-Rutherford cross-section regime application along with the crystalline sample channelling spectra and boron content measurement.

Keywords: Ion Beam Modification; Ion Beam Analysis; ion implantation; RBS; PIXE; NRA; ERDA; channeling (search for similar items in EconPapers)
Date: 2018
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Persistent link: https://EconPapers.repec.org/RePEc:vrs:repfms:v:26:y:2018:i:43:p:9-16:n:1

DOI: 10.2478/rput-2018-0025

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