PRODUCTION OF SIZE-CONTROLLEDSiFINE PARTICLES USING PULSED RF DISCHARGE

M. Shiratani, H. Kawasaki, T. Fukuzawa and Y. Watanabe
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M. Shiratani: Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812, Japan
H. Kawasaki: Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812, Japan
T. Fukuzawa: Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812, Japan
Y. Watanabe: Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812, Japan

Surface Review and Letters (SRL), 1996, vol. 03, issue 01, 75-78

Abstract: We describe a new method for production of size-controlledSifine particles that employs a pulsed RF silane discharge. Size, density, and morphology of particles prepared by this method are studied using scanning electron microscopy. Particles with a small size dispersion are produced in the size range from 10 to 120 nm and with densities above107cm−3. It is found that particles grow through three phases of nucleation, rapid growth, and growth saturation. Particles in two different size ranges coexist after the initiation of the rapid-growth phase above RF power of40W, and coagulation of particles plays a crucial role in the rapid-growth phase.

Date: 1996
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DOI: 10.1142/S0218625X96000176

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